X Y Z Stages

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Multiple configurations for these stages are available to match your specific requirements: X, XY, XZ and XYZ. XYZ stage is offered with a choice between left-handed and right-handed. A number of features make stages in this series versatile and easy to configure and reconfigure to suit sensitive optical measurements with minimal real estate. The X and Y axis are in one pattern, and they cannot be disassembled. We also provide 50 mm ranges in both X and Y axes. The XY translation stage also can be stacked by 2 units of single axis stage T125X-25R or T125X-50R. Z Vertical Stage: T125Z-10B. Refer to T125Z-10B, We also provide a 20 mm range in Z.

  1. X Y Z Microscope Stage
  2. Newport X Y Z Stage
  3. X Y Z Stage
X Y Z Stages

X Y Z Microscope Stage

X Y Z Stages

Newport X Y Z Stage

Three phases of seizure

X Y Z Stage


Precision Linear Translational Stages

M-122 Fast High Precision Miniature Linear Positioning Stage with Integrated Optical Linear Encoder


  • Compact High Precision Linear Table
  • Motion Range 25 mm
  • 0.1 µm Optical Linear Encoder for Highest Accuracy & Repeatability
  • Min. Incremental Motion to 0.2 µm
  • Max. Velocity 20 mm/s
  • Cross-Roller Bearings
  • Recirculating Ball Screw Drives Provide High Speeds & Long Lifetimes
Linear Stage Data & Order Info PDF

High-Precision Miniature Linear Positioning Stages with Ballscrew: M-110.2 - M-112.2 Drive


  • Small Precision Linear Traslational Tables, 5 to 25 mm Motion Ranges
  • 5000 h MTBF
  • Very Cost Effective
  • 200 Nanometer Minimum Inc. Motion
  • Hall - Effect Limit & Reference Switches
  • Recirculating Ballscrew for Extended Lifetime
Linear Stage Data & Order Info PDF

Miniature Precision Linear Positioning Stage with Intertia Piezo Motor


  • High Resolution Linear Translational Stage with Closed Loop Motor
  • Motion Range 13 and 26 mm; Self Locking at Rest, no Heat Generation, no Servo Dither
  • Small Dimensions
  • Piezo Inertia Drive, Ideal for Micro- and Nano-Manipulation
  • Integrated Linear Encoder Option for Highest Accuracy with Nanometer Resolution
  • Up to 10 N Force Generation
Linear Stage Data & Order Info

N-565 High-Resolution Precision Translation Table with NEXACT® Piezo Stepping Motor Drive


  • Motion Range 1/2' 1', 2'
  • 0.5 Nanometer Encoder resolution
  • Excellent guiding accuracy
  • Max. velocity 10 mm/sec
Linear Stage Data & Order Info PDF

Miniature Piezo Motor Stage, Stick-Slip Motor Q-522


  • Ultra Compact Linear Motor Stage
  • 6 to 26 mm Travel
  • Nanometer Resolution
  • Self-Locking
  • XY-Combinations Available, Rotary Motor Available
  • Vacuum Option
Linear Stage Data & Order Info

Precision Miniature Linear Positioning Stage with Closed-Loop Ultrasonic Piezo Linear Motors, M-663/U-521


  • Smallest Precision Linear Table with Closed-Loop Linear Motor Drive and Linear Encoder
  • 20 mm Motion Range
  • Velocity up to 400 mm/s
  • Accelerations up to 20 g
  • Resolution to 0.1 Micron
  • Integrated Direct-Metrology Linear Encoder
  • AutoLock Feature
  • XY Combinations Available
  • 20,000 h MTBF
  • Vacuum Versions Available
Linear Stage Data & Order Info PDF

Linear Stage with Ultrasonic Piezo Motor


  • Compact and High Precision Linear Positioning Table, with 25 mm Motion Range
  • Max. Velocity 200 mm/s
  • Ultra-Low Profile
  • Direct Metrology Linear Encoder with 0.01 µm Resolution
  • High Guiding Accuracy with Crossed Roller Bearings
  • Compact XY Version also available
  • Piezo Linear Motor
  • Self Locking at Rest
Back to TopLinear Stage Data & Order Info PDF

Precision Linear Translational Stage; Low-Profile; Piezomotor, Direct Position Metrology


  • Low Profile Linear Positioning Table:
  • Max. Velocity 10 mm/sec
  • Compact XY Combination Possible
  • Up to 8N Force Generation
  • Direct Metrology Linear Encoder, 1 Nanometer Resolution
  • Motion Ranges 26mm
  • Excellent Guiding Accuracy Through Crossed Roller Bearings
  • Non-Magnetic and Vacuum-Compatible Working Principle
  • Self-Locking at Rest
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Linear Stage Data & Order Info

XY Air Bearing Stage with Linear Motor and Linear Encoders


  • XY Linear Positioning Table: Up to 1m Travel Range
  • Nanometer Resolution
  • Integrated Linear Encoders
  • Many Different Designs
  • X and XY Planar
  • Locking Option
  • Compatible with PI Piezo Nanopositioning / Scanning stages

Why Use Air Bearing Stages PDF Catalog

XY Linear Positioning Stage with Linear Encoders, Piezo Motor, Low-Profile: M-686


  • XY Linear Table: 25 x 25 mm Motion Ranges
  • Integrated Closed-Loop Piezomotor Drives Provide High Speed to 100 mm/s
  • Integrated Linear Encoders with 0.1 µm Resolution
  • Compact Design; 27 mm Profile Height, 150 x 150 mm Footprint
  • Large Clear Aperture 78 x 78 mm, 66 x 66 mm in Extreme Position
  • Self-Locking at Rest
  • Compatible with PI Piezo Nanopositioning / Scanning stages

Linear Stage Data & Order Info PDF

Miniature Linear Stage with Piezo


  • Extremely Compact Linear Stage Family
  • X, XY and XYZ Versions
  • Piezo Drive for Nanometer Resolution
  • Precisoin Bearings
Linear Stage Data & Order Info PDF

M-011 Ultra-High-Precision Linear Positioning Stage, Side-Drive with Magnetic-Kinematic Bearings


  • Precision Linear Table with extremely Straight / Flat Motion: ≤ 0.2 Micron
  • Motion Range to 15 mm
  • Compact Side Drive
  • PZT Drive for Scanning and Tracking Applications
  • 0.1 Micro-MeterResolution with Closed-Loop DC Motor
  • 5 Nanometer Resolution with Closed-Loop PZT Drive
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PDF

M-014 Ultra-High-Precision Linear Stage, Side-Drive Stage with Magnetic-Kinematic Bearings


  • Precision Linear Table with extremely Straight / Flat Motion: ≤ 0.3 Micron
  • Motion Range 25 mm
  • Compact Side Drive
  • PZT Drive for Scanning and Tracking Applications
  • 0.1 Micro-MeterResolution with Closed-Loop DC Motor
  • 5 Nanometer Resolution with Closed-Loop PZT Drive
  • 30 mm Ø Clear Aperture
PDF

M-126 Translation Stage with Crossed Roller Bearings


  • Economical High Precision inear Table with 25 mm Motion Range
  • Manual, DC-Servo and Stepper-Motor Drives
  • ActiveDrive™ Option
  • Compatible with Leading Industrial Motion Controllers
  • Crossed Roller Bearings
  • <0.1 Micro-MeterResolution
  • XY and XYZ Combinations
  • Direction-Sensing Origin Switch
  • Non-Contact Limit Switches
Linear Stage Data & Order Info PDF

High-Resolution Precision Linear Stage with Stepper and DC Motor Drives: M-403, M- 404, M-413, M-414


  • Cost-Effective Linear Table Family
  • Modular System with 4 Series: M-403, M-404, M-413, M-414
  • Preloaded Leadscrews or Recirculating Ball Screws
  • Motion Ranges from 25 to 300 mm
  • Stress-Relieved Aluminum Base 80 and 120 mm Width
  • Minimum Incremental Motion to 0.1 Micro-Meter
  • Resolution to 0.017 Micro-Meter
Linear Stage Data & Order Info PDF

M-400 Series High-Precision Linear Stages with Crossed Roller Bearings


  • High-Precision Linear Table Series with 50, 100 & 150 mm Motion Range
  • Stress-Relieved Aluminum Stage Base for Highest Stability
  • Crossed Roller Bearings
  • Manual, DC-Servo and Stepper-Motor Drives, ActiveDrive™ Option
  • Compatible with Leading Industrial Motion Controllers
  • Manual Knob for Convenient Position Adjustment
  • Non-Contact Direction-Sensing Origin Switch
  • Non-Contact Limit Switches
Linear Stage Data & Order Info PDF

M-605 Ultra-Compact, High-Accuracy Linear Stage


  • Ultra-Precision Linear Table with Integrated Linear-Scale Encoders
  • Motion Ranges 25 mm (1') and 50 mm (2')
  • Velocity up to 50 mm/sec.
  • Active Drive™ Motors
  • Compatible with Leading Industrial Motion Controllers
  • Stress-Relieved Aluminum Stage Base for Highest Stability
  • Zero-Backlash Recirculating Ballscrews
  • Non-Contact, Direction-Sensing Origin Switch
  • Non-Contact Limit Switches
  • Load Capacity 20 kg
  • >20,000 Hours MTBF
Linear Stage Data & Order Info PDF

M-505 Low-Profile Linear Stages with Ballscrew Drives


  • Precision Linear Table with Zero-Backlash Recirculating Ballscrews
  • Motion Ranges to 150 mm (6 inches)
  • Velocity up to 50 mm/sec.
  • ActiveDrive™ Motors
  • Compatible with Leading Industrial Motion Controllers
  • Stress-Relieved Aluminum Stage Base for Highest Stability
  • Non-Contact Direction-Sensing Origin Switch
  • Non-Contact Limit Switches
  • Load Capacity 100 kg
  • > 20,000 Hours MTBF
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Linear Stage Data & Order Info PDF

M-511 · M-521 · M-531 Low-Profile, High-Load Linear Stages with Ballscrew Drives


  • High-Load Linear Tables with Zero-Backlash Recirculating Ballscrews
  • Motion Ranges to 306 mm (12')
  • Velocity up to 125 mm/sec.
  • ActiveDrive™ Motors
  • Compatible with Leading Industrial Motion Controllers
  • Linear-Scale Encoders for Highest Accuracy
  • Stress-Relieved Aluminum Stage Base for Highest Stability
  • Non-Contacting Origin and Limit Switches
  • PIIntelliStage™ Version with Integrated Controller
  • Load Capacity 100 kg
  • >20000 Hours MTBF
Linear Stage Data & Order Info PDF

V-551 Long-Travel, High-Speed Linear Motor Staage


  • 3-Phase Linear Motor
  • 1 Nanometer Linear Encoder Resolution
  • 50m - 230mm Motion Range
  • Velocities to 250 mm/sec
  • Excellent Velocity Control
  • Absolute Encoder
  • Reliable Execution of Minimal Increments
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Linear Stage Data & Order Info PDF
Voice Coil Scanning Stage

V-52x Long-Travel, High-Dynamics Scanning Tables with Voice Coil Linear Motors


  • Fast Scanning and Positioning
  • Scanning Frequency 10s of Hz
  • Motion Ranges of 20 mm and 6 mm
  • Velocity up to 270 mm/s
  • 0.1 Micro-MeterLinear Encoder
  • Available PCI-Card Controller with On-Board Amplifiers
Linear Stage Data & Order Info PDF